2017

C. Burtscher, D. Seyringer, M. Lucki, A. Kuzma: “Design and simulation of 1x32 Y-branch splitter applying different photonics tools”, APCOM 2017, 12-14 June 2017, High Tatras, Transka Lomnica, Slovakia.

D. Seyringer, P. Lampert: „Development of eLearning platform in photonics”, The European Conference on Education 2017 (ECE2017), iafor (The International Academic Forum), Brighton, UK, June 29 - July 2, 2017.

D. Seyringer, C. Burtscher, L. Gajdosova: “Si3N4 based 40-ch, 50-GHz AWG for medical applications”, APCOM 2017, 12-14 June 2017, High Tatras, Transka Lomnica, Slovakia.

J. Voyer, F. Ausserer, S. Klien, A. Ristow, I. Velkavrh, A. Diem, J.Zehetner, S. Stroj, S. Heidegger, C. Bertschler, and J. Edlinger, „Sub-Micro Laser Modifications of Tribological Surfaces“, Materials Performance & Characterization - Special Issue on Surface Texturing; DOI: 10.1520/MPC20160015

S. Partel, S. Kasemann, V. Matylitskaya, C. Thanner, C. Dincer, and G. Urban, “A simple fabrication process for disposable interdigitated electrode arrays with nanogaps for lab-on-a-chip applications,” Microelectron. Eng., vol. 173, pp. 27–32, Apr. 2017

D. Seyringer, C. Burtscher, S. Partel, J. Edlinger, A. Maese-Novo, P. Muellner, R. Hainberger, J. Kraft, G. Koppitsch, G. Meinhardt: “Design and simulation of 20-channel, 50-GHz Si3N4 based arrayed waveguide grating applying AWG-Parameters tool”, SPIE Photonics West, 27.1. – 2.2.2017, San Francisco, Paper 101061L, Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101061L (February 16, 2017); doi:10.1117/12.2249675;

C. Burtscher, D. Seyringer, M. Lucki, L. Kohler: “New waveguide shape for low-loss and high-uniformity Y-branch splitter”, SPIE Photonics West, 27.1. – 2.2.2017, San Francisco, Paper 101061M, Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101061M (February 16, 2017); doi:10.1117/12.2249758;

L. Gajdosova, D. Seyringer: “Simulation of 20-channel, 50-GHz Si3N4-based arrayed waveguide grating applying three different photonics tools”, SPIE Photonics West, 27.1. – 2.2.2017, San Francisco, Paper 101061X, Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101061X (February 16, 2017); doi:10.1117/12.2267817;

2016

M. Bandić, G. Verbanac, M. B. Moldwin, V. Pierrard, G. Piredda: “MLT dependence in the relationship between plasmapause, solar wind, and geomagnetic activity based on CRRES: 1990-1991”, Journal of Geophysical Research - Space Physics, 121, 4397 (2016), Doi: 10.1002/2015JA022278

Matthias Domke, Elisabeth Kostal, Sandra Stroj, Stephan Kasemann, Volha Matylitskaya, Wasser sammeln wie ein Nebeltrinker-Käfer: Herstellung biomimetischer Oberflächen mit fs-Lasern, Workshop Erzeugung bionischer Oberflächen mittels Laserstrukturierung, Nürnberg, Germany, 16. November 2016. (Presentation only)

Matthias Domke, Bernadette Egle, Giovanni Piredda, Sandra Stroj, Gernot Fasching, Marius Bodea, Elisabeth Schwarz. Ultrashort pulse laser dicing of thin Si wafers. Journal of Micromechanics and Microengineering. 26(11), 115004 (2016), DOI: 10.1088/0960-1317/26/11/115004.

D. Seyringer, L. Gajdosová, C. Burtscher: Arrayed Waveguide Gratings: Design and Simulation, 19th school of vacuum technology: Vacuum and new materials, 9-12 November 2016, Hohe Tatra, Slovakia (invited talk).

L. Gajdosová, D. Seyringer: Design of Si3N4 AWGs applying various photonics tools, 19th school of vacuum technology: Vacuum and new materials, 9-12 November 2016, Hohe Tatra, Slovakia.

Matthias Domke, Benjamin Bernard, Victor Matylitsky, Ultrashort pulse laser dicing of thin silicon wafers: influence of pulse duration and burst mode on cutting speed and quality, 42nd Micro and Nano Engineering (MNE 2016), 19-23 September, Vienna, 2016. (Presentation only)

S. Partel, S. Kasemann, V. Matylitskaya, C. Thanner, C. Dincer, G. Urban: A simple fabrication process for disposable interdigitated electrode arrays with adjustable nanogaps for lab-on-a-chip applications, 42nd Micro and Nano Engineering (MNE 2016), 19-23 September, Vienna, 2016.

D. Seyringer, C. Burtscher, S. Partel, J. Edlinger, A. Maese-Novo, P. Muellner, R. Hainberger, J. Kraft, G. Koppitsch, G. Meinhardt: Design and Simulation of Si3N4 Based Arrayed Waveguide Gratings Applying AWG-Parameters Tool,  ICTON 2016 (18th International Conference on Transparent Networks), 10-14 July 2016, Trento, Italy (invited talk).

D. Seyringer, C. Burtscher, G. Piredda, A. Prasad and J. Zehetner: „The Night of Science: Optics and Photonics for All”, The European Conference on Technology in the Classroom 2016 (ECTC2016), iafor (The International Academic Forum), Brighton, UK, June 29 - July 3, 2016.

D. Seyringer: “Application of Angular Method to Correct Channel Spacing Between AWG Demultiplexed Channels”, TechConnect World Innovation conference&Expo 2016, Washington DC., May 22-25, 2016, in TechConnect Briefs 2016: Advanced Manufacturing, Electronics and Microsystems, , Vol. 4, Chapter 7: Photonic Materials & Devices, p. 267-270.

Stephen Ho, Matthias Domke, David Roper, Heinz P. Huber, Peter R. Herman, Femtosecond Laser Quantized Structuring in thin SiOx Film, CLEO: Science and Innovations 2016, San Jose, California United States, 5–10 June 2016, DOI: 10.1364/CLEO_SI.2016.STh3Q.4.

S. Partel, Fabrication of interdigitated electrode arrays for biosensors by advanced mask aligner lithography, Dissertation:  DOI: 10.6094/UNIFR/10934
D. Seyringer: Arrayed waveguide gratings, in SPIE Spotlights - New e-book series, SPIE Press, P.O. Box 10, Bellingham, Washington 98227-0010 USA, 2 June 2016, doi: http://dx.doi.org/10.1117/3.2242852.

J. Zehetner, S. Kraus, M. Lucki, G. Vanko, J. Dzuba, T. Lalinsky. “Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors” Microsystem Technologies, No. 22, Vol. 4, April 2016, DOI 10.1007/s00542-016-2887-2

J. Zehetner, S. Kraus, M. Lucki, G. Vanko, J. Dzuba, I. Ryger, T. Lalinsky. “Micro Structuring of AlGaN/GaN based HEMT Sensor Devices on Bulk SiC Substrates by Femtosecond Laser Ablation” BIT´S 2nd Annual World Congress of Smart Materials - 2016, March 4-6, 2016, Singapore, (invited talk).

Martín-Sánchez J., Trotta R. , Piredda G. , Schimpf C. , Trevisi G. and Seravalli L. , Frigeri P. , Stroj S. , Lettner T. , Reindl M. , Wildmann J. S. , Edlinger J. , Rastelli A. “Reversible Control of In-Plane Elastic Stress Tensor in Nanomembranes”, Advanced Optical Materials, Doi: 10.1002/adom.201500779

Trotta R., Martín-Sánchez J., Wildmann J. S., Piredda G., Reindl M., Schimpf C., Zallo E., Stroj S., Edlinger J. and Rastelli A. “Wavelength-tunable sources of entangled photons interfaced with atomic vapours” Nat. Comm. ,15, 10375 (2016). Doi:10.1038/ncomms10375

Partel, S.; Urban, G. Innovative Method to Suppress Local Geometry Distortions for Fabrication of Interdigitated Electrode Arrays with Nano Gaps. In Proc. SPIE 9780; SPIE: San Jose, CA, 2016; Vol. 9780, pp. 978015-978015 - 8.

C. Burtscher, D. Seyringer, M.Lucki: Study of Optical Properties of 1x16 Splitter based on Y-Branch and MMI Approaches,  ICTON 2016 (18th International Conference on Transparent Networks), 10-14 July 2016, Trento, Italy.

C. Burtscher, D. Seyringer, M.Lucki: Study of Splitting Properties of 1x16 Splitter MMI Splitter based on Different Widths of the Multimode Interference Section,  ADEPT 2016 (Advanced in Electronic and Photonic), 20 - 22 June 2016, High Tatras, Transka Lomnica, Slovakia.

Matthias Domke, Bernadette Egle, Giovanni Piredda, Gernot Fasching, Marius Bodea, Elisabeth Schwarz, Investigation of the breaking strength of ultrashort pulse laser diced thin Si wafers, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, San Francisco, California, United States, 13 - 18 February 2016 (Presentation only)

Matthias Domke, Johannes Gratt, Ronald Sroka. Fabrication of homogeneously emitting optical fiber diffusors using fs-laser ablation. Proceedings of SPIE - The International Society for Optical Engineering. 97400O, 1–10 (2016), DOI: 10.1117/12.2212475.

Matthias Domke, Giovanni Piredda, Johann Zehetner, Sandra Stroj. Minimizing the Surface Roughness for Silicon Ablation with Ultrashort Laser Pulses. Journal of Laser Micro/Nanoengineering. 11(1), 100–103 (2016), DOI: 10.2961/jlmn.2016.01.0019.

2015

M. Domke, B. Egle, G. Piredda, G. Fasching., M. Bodea., E. Schwarz, Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses, SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, Paper: 9350-56

M. Domke, Conditions for random and periodic hole formations during surface ablation of silicon with ultrashort pulsed lasers, SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, Paper: 9355-38

M. Domke, S. Wick, H. Huber, M. Laible, J. Edlinger, C. Homann, J. Kutnesova, R. Sroka, Investigations of the damage mechanisms during ultra short pulse laser ablation of dental tissue SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, (Presentation)

Domke, M. Transiente physikalische Mechanismen bei der Laserablation von dünnen Metallschichten Dissertation: ISBN 978-3-87525-385-6

Domke, M., Wick, S., Laible, M., Rapp, S., Kuznetsova, J., Homann, C., Huber, H. P., and Sroka, R., Investigations of the damage mechanisms during ultrashort pulse laser ablation of dental tissue Proc. SPIE 95420Q, 1–7 (2015). Doi: 10.1117/12.2184039

Domke, M., Piredda, G., Zehetner, J., and Stroj, S., Minimizing the surface roughness for silicon ablation with ultrashort laser pulses Proc. LAMP 15-021, 1–4 (2015). Poster

Zehetner, J., Domke, M., Piredda, G., Kraus, S., Lucki, M., Vanko, G., Dzuba, J., Ryger, I., Lalinsky, T., Benkler, M., Laser polarization condition affecting ablation quality of thin membranes for SiC or ceramic based GaN/ferroelectric thin film MEMS and pressure sensors Proc. LAMP 15-053, 1-6 (2015)

Piredda G., Rein A., Zehetner J. and Matylitsky V., Mechanical properties of ultrafast‐laser cut poly(lactic acid) films, Proc. LIM, (2015).

Domke, M., Piredda, G., and Stroj, S., Calculating the optimal combination of pulse-to-pulse distance and fluence for scribing and patterning with ultrashort pulsed lasers Proc. LIM, 1–6 (2015). Poster

Domke, M., Gavrilova, A., Rapp, S., Frentzen, M., Meister, J., and Huber, H. P., Time-resolved microscopy reveals the driving mechanism of particle formation during ultrashort pulse laser ablation of dentin-like ivory Journal of Biomedical Optics 20(7), 76005 (2015); Doi:10.1117/1.JBO.20.7.076005

Domke, M., Felsl, D., Rapp, S., Sotrop, J., Huber, H. P., and Schmidt, M., Evidence of Pressure Waves in Confined Laser Ablation J. Laser Micro Nanoeng. 10(2), 119–123 (2015); Doi:10.2961/jlmn.2015.02.0002

Partel, S.; Dincer, C.; Kasemann, S.; Kieninger, J.; Edlinger, J.; Urban, G. Lift-Off Free Fabrication Approach for Periodic Structures with Tunable Nano Gaps for Interdigitated Electrode Arrays. ACS Nano 2015. Doi:10.1021/acsnano.5b06405

D. Seyringer: Children’s University: Optics and Photonics for Children, 7th International Conference on Education, Research and Development, Elenite, Bulgaria, 4–8 September 2015 (published in Journal of International Scientific Publications - Educational Alternatives, Volume 13, 2015, p. 130-137, ISSN 1314-7277). Published: http://www.scientific-publications.net/en/article/1000922/

C. Burtscher, M. Lucki and D. Seyringer: Comparison of Optical Properties of 1x8 Splitters Based on Y-Branch and MMI Approaches, Micro- to Nano-Photonics IV- ROMOPTO 2015 (published in Romanian Reports in Physics, Vol. 67, No. 4, P. 1578-1585), 1-4 September, 2015, Bucharest, Romania.

D. Seyringer: Application of various tools to design, simulate and evaluate optical demultiplexers based on AWG, APCOM 2015, 24 to 26 June 2015, High Tatras, Slovakia, in Proc. of APCOM, p….

V. Matylitskaya: Study of selective wet etching of titanium towards copper in hydrofluoric free etchant, APCOM 2015, 24 to 26 June 2015, High Tatras, Slovakia, in Proc. of APCOM, p….

C. Burtscher, M. Lucki and D. Seyringer: Design, Simulation and Optimization of High Channel Optical Splitters, Advances in Electronic and Photonic Technologies (ADept) 2015, 1-4 June, 2015, High Tatras, Strbske Pleso, Slovakia.

J. Zehetner, D. Schmidmayr, G. Piredda, S. Kasemann, V. Matylitskaya, M. Lucki: Laser generated micro- and Nanostructures and the transfer to polymers for experimental use, APCOM 2015, 24 to 26 June 2015, High Tatras, Slovakia, in Proc. of APCOM, p282

Zehetner, J., Vanko, G., Dzuba, J., Benkler, M., Lucki, M., Rýger, I., Lalinský, T., Laser ablation for membrane processing of AlGaN/GaN- and microstructured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions MICROTECHNOLOGIES, Barcelona, Spain, 4–6 May (2015)

D. Seyringer and E. Hodzic: Calculation of accurate channel spacing of an AWG optical demultiplexer applying proportional method, SPIE Microtechnologies,  4-6 May, 2015, Barcelona, Spain, Proc. SPIE 9520, Integrated Photonics: Materials, Devices, and Applications III, 95200T (1 June 2015); Doi:10.1117/12.2178271.

R. Ciesielski, A. Comin, M. Handloser, K. Donkers, G. Piredda, A. Lombardo, A. C. Ferrari, A. Hartschuh
Graphene Near-Degenerate Four-Wave Mixing for Phase Characterization of Broadband Pulses in Ultrafast Microscopy, Nano Lett., 2015, 15 (8), pp 4968–4972; Doi: 10.1021/acs.nanolett.5b00893

M. Lucki, S. Kraus, R. Zeleny, J. Zehetner, D. Seyringer, J. Latal, F. Perecar: Investigation of optical thin films printed on the surface of facets of photonic crystal fibers, Proc. SPIE  9507, Micro-structured and Specialty Optical Fibres IV, 95070A (May 7, 2015 Proc. SPIE  9507, Micro-structured and Specialty Optical Fibres IV, 95070A (May 7, 2015); Doi: 10.1117/12.2182203

M. Domke, B. Egle, G. Piredda, G. Fasching., M. Bodea., E. Schwarz, Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses, SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, Paper: 9350-56; Doi: 10.1117/12.2079821
 
M. Domke, Conditions for random and periodic hole formations during surface ablation of silicon with ultrashort pulsed lasers, SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, Paper: 9355-38; Doi: 10.1117/12.2079851
 
M. Domke, S. Wick, H. Huber, M. Laible, J. Edlinger, C. Homann, J. Kutnesova, R. Sroka, Investigations of the damage mechanisms during ultra short pulse laser ablation of dental tissue SPIE Photonics West 2015, 7 to 12 February, 2015, San Francisco, (Presentation)

2014

J. Martín-Sánchez, R. Trotta, G. Piredda, S. Stroj, J. Edlnger, T. Lettner, I. Daruka, G. Trevisi, L. Seravalli, P. Frigeri and A. Rastelli: Micromachined piezo-actuator for full control of in-plane stress in thin films, nanoFIS 2014, 3 to 5 December 2014, Graz, Austria.

M. Niedermayr, K. Lakhmanskiy, M. Kumph, S. Partel, J. Edlinger, M. Brownnutt, and R. Blatt, “Cryogenic surface ion trap based on intrinsic silicon,” New J. Phys., vol. 16, no. 11, p. 113068, Nov. 2014. Doi: 10.1088/1367-2630/16/11/113068

M. Domke: The state of matter of thin molybdenum films at the ablation threshold using ns- and ps-pulses, Laser Processing in Photovoltaics, 27 to 28 November 2014, Leipzig, Germany.

B. Fäßler, G. Piredda and Johann Zehetner: SYSTEMATIC STUDY OF THE ROUGHNESS OF BIODEGRADABLE POLYMER SURFACES PROCESSED BY ULTRASHORT LASER PULSES, ICALEO 2014, 19 to 23 October 2014, San Diego, CA, USA. Show PDF: Paper

D. Schmidmayr, J. Zehetner and P. Amann: Investigation of Optical Stability Issues with Embedded Semiconductor Quantum Dots used as Colour Conversion Material in LED Lighting Applications, ASDAM 2014, 20 to 22 October 2014, Smolenice Castle, Slovakia, in Proc. of ASDAM. DOI: 10.1109/ASDAM.2014.6998706

J. Zehetner, G. Vanko, P.Choleva, J.Dzuba, I.Ryger, T.Lalinsky: Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions, ASDAM 2014, 20 to 22 October 2014, Smolenice Castle, Slovakia. DOI: 10.1109/ASDAM.2014.6998693

G. Vanko, J. Zehetner, P.Choleva, J.Dzuba, I.Ryger, T.Lalinsky: Fabrication of SiC diaphragms for MEMS sensors using laser ablation, 40th MNE, 22 to 26 September, Lausanne Switzerland. Show PDF: Poster

C. Burtscher and D. Seyringer: Design of low loss 1*64 Y-Branch splitter having symmetric splitting ratio, ASDAM 2014, 20-22 October, 2014, Smolenice, Slovakia.

E. Hodzic and D. Seyringer: Calculation of accurate channel spacing of an Arrayed Waveguide Grating optical multiplexer/demultiplexer, ASDAM 2014, 20 to 22 October, 2014, Smolenice, Slovakia.

M. Domke, L. Nobile, S. Rapp, S. Eiselen, J. Sotrop, H. P. Huber, M. Schmidt, Understanding thin film laser ablation: The role of the effective penetration depth and the film thickness, 8th International Conference on Photonic Technologies LANE 2014, 08 to 11 September, 2014, Physics Procedia 56 ( 2014 ), 1007 – 1014. Doi: http://www.sciencedirect.com/science/article/pii/S1875389214001576

M. Domke, S. Wick, H. Huber, M. Wahler, J. Edlinger, C. Homann, J. Kutnesova, R. Sroka, Investigations of the damage mechanisms during ultra short pulse laser ablation of dental tissue, International Conference on Laser Applications in Life Sciences, 29 June to 2 July 2014, Ulm, Germany, (Talk). Show Abstract: SPIE

M. Domke, D. Felsl, S. Rapp, J. Sotrop, H. P. Huber, M. Schmidt, The role of shockwaves in confined laser ablation, Proceedings of LPM2014 - the 15th International Symposium on Laser Precision Microfabrication, Vilnius, Litauen, 2014. Paper

Partel, S. Kasemann, P. Choleva, C. Dincer, J. Kieninger, G.A. Urban, Novel fabrication process for sub-μm interdigitated electrode arrays for highly sensitive electrochemical detection, Sensors and Actuators B: Chemical, (29. Aug, 2014). Doi: 10.1016/j.snb.2014.08.065

D. Schmidmayr and J. Zehetner, Quantum Dots, advantages and drawbacks for lighting applications, APCOM 2014, 25 to 27 June 2014, High Tatras, Slovakia, in Proc. of APCOM p.30 (invited talk). Show PDF: Paper 

A. Comin, R. Ciesielski, G.i Piredda, K. Donkers, and A. Hartschuh, Compression of ultrashort laser pulses via gated multiphoton intrapulse interference phase scans, JOSA B 31, 1118-1125 (2014). Doi: http://arxiv.org/abs/1401.5952

C. Burtscher and D. Seyringer, Influence of waveguide structure on Y-branch splitting ratio, SPIE Photonics Europe 2014, Silicon Photonics and Photonic Integrated Circuits conference, 14 to 17 April  2014, Brussels, Paper: 9133-43. Doi: 10.1117/12.2050846

S. Partel, Resolution enhancement for Mask-Aligner lithography by using 193 nm ArF excimer laser, Ultra optics status seminar, Fraunhofer IOF, 27 March 2014, Jena, (Invited talk).

D. Seyringer, P. Schmid, M. Bielik; F. Uherek, J. Chovan, et al.: Design, simulation, evaluation, and technological verification of arrayed waveguide gratings, Opt. Eng. 53(7), 071803 (21 January 2014). DOI: 10.1117/1.OE.53.7.071803

T. Pacher, A. Prinz, S. Partel, V. V. Matylitsky, S. Stroj, Microstructuring of resist double layers by a femtosecond laser ablation and UV lithography hybrid process, Photonics West 2014, 2 to 6 February 2014, San Francisco, Paper: 8968-24. Doi: 10.1117/12.2037683

T. Pacher, A. Prinz, S. Partel, V. V. Matylitsky, S. Stroj, Selective structuring of thick SU-8 layers on fused silica by femtosecond laser ablation for medical applications, Photonics West 2014, 2 to 6 February 2014, San Francisco, Paper: 8976-3. Show PDF: Presentation

2013

J. Chovan, A. Kuzma, F. Uherek, D. Seyringer and G. Patassy: Fotonicke sensory pre zivotne prostredie – monitorovanie kvality pitnej vody, Casopis EE, vol. 19, No. 5/S, p. 40-43, 2013.

J. Zehetner, S. Stroj, G. Zanghellini: Facilitating the fabrication of micron scale composite polymer inlays in ceramics substrates using femtosecond pulse laser ablation technique, the 12th international Conference on Laser Ablation (COLA 2013), 7 to 11 October 2013, Ischia. Show PDF: Poster

D. Schmidmayr, J. Zehetner, J. Edlinger: New Developments in Quantum Dots, 3rd International LED professional Symposium +Expo (LpS 2013) 24 to 26 September 2013, Bregenz, LED Lighting Technologies – Winning Approaches, pp. 26-33; ISBN 987-3-9503209-2-3

M. Držík, J. Dzuba, G. Vanko, P. Hudek, P. Choleva, T. Lalinský, I. Rýger: Experimental measurement of the AlGaN/GaN membrane piezoelectric response by pressure loading, 39th International Conference on MNE, 16 to 19 September 2013, London. Show PDF: Poster

J. N. Tisserant, G. Wicht, O. F. Göbel, E. Bocek, G.-L. Bona, T. Geiger, R. Hany, R. Mezzenga, S. Partel, P. Schmid, W. B. Schweizer, and J. Heier: Growth and Alignment of Thin Film Organic Single Crystals from Dewetting Patterns, ACS Nano, vol. 7, no. 6, pp. 5506–5513, June 2013. pubs.acs.org/doi/abs/10.1021/nn401679s

D.Seyringer: Application of AWG-Parameters Tool in Design of Colourless 8-channel, 100 GHz AWG, ICTON 2013, 23 to 27 June 2013, Cartagena, Spain, in Proc. of ICTON - TU.p.16. IEEE Catalog Number: CFP13485-USB. ISBN: 978-1-4799-0682-6. DOI: 10.1109/ICTON.2013.6602885. Show PDF: Poster

D.Seyringer: AWG optical demultiplexers: from design to chip, APCOM 2013, 19 to 21 June 2013, High Tatras, Slovakia, in Proc. of APCOM p.15 (invited talk).

F.Uherek, J.Chovan, A.Kuzma, P.Pisecny, D.Hasko, D.Seyringer: Silicon NanoPhotonics, ADEPT 2013, 2 to 5 June 2013, High Tatras, Slovakia, in Proc. of ADEPT p. 1 (invited talk).

D.Seyringer, L.Kohler, F.Uherek, J.Chovan and A.Kuzma: Influence of Waveguide Structure on Y-branch Splitting, ADEPT 2013, 2 to 5 June 2013, High Tatras, Slovakia, in Proc. of ADEPT p. 266. Show PDF: Poster

G.Vanko, P.Hudek, J.Zehetner,J.Dzuba, P.Choleva, M.Valllo, I.Rýger and T.Lalinský: MEMS pressure sensor fabricated by advanced bulk micromachining techniques, SPIE Microtechnologies 2013, 24 to 26 April 2013, Grenoble, France. Show PDF: Poster

D. Schmidmayr, J. Zehetner: Quantum Dots and Organic Fluorescent Molecules for LED-based White-Light Generation, 7. Forschungsforum der Österreichischen Fachhochschulen, 3 to 4. April 2013, in: G. Kempter, H. J. Lofner (Hrsg.): Grenzenlos Kooperieren. Forschung im Dialog mit Gesellschaft und Wirtschaft. Berlin: Wissenschaftlicher Verlag Berlin, S.379-386 (2013).

P.Hudek and P.Choleva: Lithography– Resist- Etching Process Chain in the M(N)EMS Fabrication, GenISys BEAMeeting 2013 Freiburg, 14 to 15 March 2013, Technical Workshop& Discussion, IAF Fraunhofer, Freiburg, Germany. Show PDF: Presentation

D. Seyringer und J. Edlinger: Photonik – Aktivitäten an der FH Vorarlberg,
Photonik-Austria, 28 February 2013, Wien. Show PDF: Presentation

D.Seyringer and M.Bielik: AWG-Parameters: new software tool to design arrayed waveguide gratings, SPIE Photonics West 2013, 2 to 7 February 2013, San Francisco (USA). Show PDF: Poster

2012

A.Kuzma, F.Uherek, E.Koza, D.Seyringer, G.Patassy, B.Pikus, J.Sukula, M.Mucka, J.Chovan, Vyroba a vyuzitie Braggovych mriezok v optickych vlaknach, Seminar: NANO A SMART TECHNOLOGIE, ILC Bratislava, 12. December 2012

G.Vanko, J. Zehetner, P. Choleva, T. Lalinský, P. Hudek: Laser Ablation: A supporting technique to micromachining of SiC, 2012 IEEE International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 11 to 15 November 2012, Smolenice (Slovakia), Published in IEEE Electron Devices (2013).

D.Seyringer, F.Uherek, J.Chovan and A.Kuzma: Design, Simulation and Evaluation of AWG Based Demultiplexers, 2012 IEEE International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), 11 to 15 November 2012, Smolenice (Slovakia), Published in IEEE Electron Devices (2013).

D.Seyringer: Vacuum in Photonics, 15th school of Vacuum Technology: Vacuum and Progressive Materials, 8 to 11 November 2012, Štrbské Pleso, Slovakia (invited talk).

J.Chovan, A.Kuzma, F.Uherek, D.Seyringer, Navrh a simulacia fotonickych senzorov, Konferenz: Elektrotechnika, informatika a telekomunikacie 2012, Bratislava, 9 to 12 October 2012. Published in : Journal of Electrical and Power Engineering, ISBN: 978-80-970493-4-8.

S.Partel, G.A.Urban, K.Motzek: Simulation model validation of two common i-line photoresists, 38th International Conference on Micro and Nano Engineering, 16 to 20 September 2012, Toulouse (France), will be published in Microelectronic Engineering (2013).

Gabriel Vanko, Peter Hudek, Jaroslav Dzuba, Pavlina Choleva, Martin Vallo, Johann Zehetner, Ivan Rýger, Tibor Lalinský: Bulk micromachining of SiC substrate for MEMS sensor applications, 38th International Conference on Micro and Nano Engineering, 16 to 20 September 2012, Toulouse (France), will be published in Microelectronic Engineering (2013).

P.Choleva: Development of microtechnical production processes and components of Microsystems, Beyond Everest project FP7, University of Sofia, Faculty of chemistry, 17 July 2012, Sofia, Bulgaria (invited talk).

D.Seyringer: Design and Simulation of 128-channel 10 GHz AWG for Ultra-Dense Wavelength Division Multiplexing, ICTON 2012 (International Conference on Transparent Optical Networks), 2 to 5 July 2012, Warwick, U.K.

S.Partel, M.Mayer and K.Motzek: In-situ measurement and characterization of photoresists during development, SPIE Newsroom, 1 May 2012.

J.-N.Tisserant, R.Hany, S.Partel, G.-L.Bona, R.Mezzenga and J.Heier: Dewetting-driven hierarchical self-assembly of small semiconducting molecules, Soft Matter, 8, p. 5804-5810 (2012). Received 8 February 2012, Accepted 20 March 2012

2011

D.Seyringer, F.Uherek, J.Chovan, P.Schmid, M.Bielik and J.Edlinger: Design and Simulation in Photonics, IFME 2011 (International Forum of Mechanical Engineering), FHV, Dornbirn, 24 to 26 November 2012.

A.Kuzma, J.Chovan, F.Uherek, D.Seyringer: Design and Simulation of Planar Passive Optical MMI Splitters, 23th conference and exhibition „Optical communication 2011“, Prag, 20 to 21 October 2011, ISBN 978-80-86742-31-1.

S.Partel, M.Mayer, P.Hudek, C.Dinçer, J.Kieninger, G.A.Urban, K.Motzek, L.Matay: Fabrication process development for a high sensitive electrochemical IDA sensor, MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, 19 to 23 September 2011. Published in Microelectronic engineering 97 (2012) Pages 235-240.

K.Motzek, S.Partel, A.Bramati, U.Hofmann, N.Unal, M.Hennemeyer, M.Hornung, A.Heindl, M.Ruhland, A.Erdmann, P.Hudek: Mask Aligner Lithography Simulation – From Lithography Simulation to Process Validation, MNE 2011 (Micro- and Nano Engineering Conference) Berlin, Germany, 19 to 23 September 2011. Published in: Microelectronic Engineering, Volume 98 (2012) 121-124.

T.Lalinský, P.Hudek, G.Vanko, P.Choleva, M.Vallo, L.Matay, I.Kostič, M.Držík: Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices, MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, 19 to 23 September 2011. Published in: Microelectronic Engineering, Volume 98, October 2012, Pages 578-581.

J.Chovan, F.Uherek, R.Kurinec, A.Satka, J.Pavlov, D.Seyringer: Temperature characterization of passive optical components for WDM-PON FTTx, Advances in electrical and electronic engineering: Optics and optoelectronics, vol. 2, Nr. 2, September 2011, p. 143-149.

D.Seyringer, P.Schmid: A new software tool is developed to evaluate the measured/simulated transmission characteristics of optical multilexers/ demultiplexers, SPIE OSD11 (Optical system design Conference 2011), Marseille, France, 5 to 8 September 2011.

D.Seyringer, M.Bielik, M.Kytka: Introduction of a new software tool to design arrayed waveguide gratings, 16th International Conference on  Applied Physics of Condensed Matters, APCOM 2011, Nový Smokovec, High Tatras, Slovakia, 22 to 24 June 2011. Page 122

P.Hudek: Modeling of heating & fogging  effect in e-beam lithography, BEAMeeting 2011 Paris, Laboratoire de Photonique et de Nanostructures, Centre National de la Recherche Scientifique - UPR2, Marcoussis, 31 March 2011.

S.Stroj: Von Einstein's Koeffizienten zur Blechbearbeitung - eine kleine Geschichte des Lasers, VTT - Vorarlberger Technik Tag 2011, FH Vorarlberg, Dornbirn, Austria, 18 January 2011.

2010

S.Hermann, T.Dezhdar, N.Harder, R.Brendel, M. Seibt and S.Stroj: Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers, Published in:J. of Appl. Phys., 108, 114514 (2010).

L.Matay, R.Andok, V.Barák, A.Ritomský, A.Konečníková, I.Kostič, S.Partel, P.Hudek: Material optimization of the alignment marks for the EBDW lithography, Presented at the 8th IEEE International Conference on Advanced Semiconductor Devices and Micro-systems ASDAM ’10 (25 October 2010) Smolenice (Slovakia). Published in: IEEE Electron Dev. Society (2010).

D.Seyringer: Low Loss and High Uniformity Multimode Interference Splitter Operating in a Wide Wavelength Band, ICOCN 2010 - The 9th International Conference on Optical Communications and Networks,  24 to 27 October 2010, Nanjing, China.

P.Hudek: High-Resolution Micro- and Nano-Lithography, Erwin Schrpdinger Kolloquium 2010, University of Vienna, Vienna, Austria, 28 June 2010.

L.Matay, R.Andok, A.Ritomský, V.Barák, I.Kostič, S.Partel, P.Hudek: Alignment Marks for the EBDW Lithography, 16th International Conference on  Applied Physics of Condensed Matters, APCOM 2010, Mala Lucivna, Slovak Republic, 16 to 18 June 2010.
Published in: Proc.16th International Conference on Applied Physics of Condensed Matters
ISBN 978-80-227-3307-6.

S.Stroj: Die Herstellung von Mikrostrukturen mittels selektiver Laserablation mit  ultrakurzen Laserpulsen und deep-UV Strahlquellen, DOMIT 2010, 5. Dornbirner Mikrotechniktage, Dornbirn, Austria, 8 to 9 June 2010.

 D.Seyringer: Improvement of the Channel Crosstalk in Narrow Channel Spacing Arrayed Waveguide Gratings Applying Specially Shaped Couplers, Photonics Europe 2010, Brussels, Belgium, 12 to 16 April 2010.

P.Choleva, S.Partel, R.Mathies:  Mikrogalvanik in dicken SU8 Strukturen, 4. Forschungsforum der Österreichischen Fachhochschulen 2010, Pinkafeld, Austria,  April 7 to 8, 2010. Published in: Fachhochschulstudiengänge Burgenlang GesmbH, ISBN: 978-3-200-01809-9.

S. Partel, S. Zoppel, P. Hudek, A. Bich, U. Vogler, M. Hornung, R. Voelkel: Contact and Proximity Lithography using 193nm Excimer Laser in Mask Aligner, MNE’09 - International Micro- and Nano-Engineering Conference, Ghent, Belgium, 28 September to 1 October 2009.

K. Motzek, A. Bich, A. Erdmann, M. Hornung, M. Hennemeyer, B. Meliorisz, U. Hofmann, N. Unal, R. Voelkel, S. Partel, P. Hudek: Optimization of illumination pupils and mask structures for proximity printing, MNE’09 - International Micro- and Nano-Engineering Conference, Ghent, Belgium, 28 September 28 to 1 October 2009.

2009

G. Mozdzen, F. Rüdenauer, W. Costin, P. Sattler, P. Hudek:Ultra low voltage SEM for high accuracy measurements of CD/LWR/LER, (MC2009), Graz, Austria, 30 August to 4 September 2009.

L. Matay, R. Andok, A. Bencurová, A. Ritomský, I. Kostic, S. Partel, P. Hudek:   Preparation method of large and complex defect-free chips directly-written by ZBA 21 e-beam tool, 15th International Conference on Applied Physics of Condensed Matter (APCOM 2009), Liptovský Ján, Slovakia, 24 to 26 June 2009. Published in: 15th International Conference on Applied Physics of Condensed Matter (APCOM 2009) ISBN 978-80-554-0057-0.

P. Hudek: E-beam lithography: overview, e-beam systems and writing strategies, resolution limits and pattering fidelity issues, resist for e-beam lithography. E-beam lithography: modeling, pattern degrading effects and exposure  optimization, future developments and novel concepts, multi-beam techniques, 5th Fraunhofer IISB Lithography Simulation Course, Erlangen, Germany, 4 to 5 June 2009.

C. Riesch, E. K. Reichel, A. Jachimowicz, J. Schalko, P. Hudek, B. Jakoby, F. Keplinger: A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout.

F.Hämmerle: Elektrodynamische Simulation miniaturisierter RFID-Spulen, VTT - Vorarlberger Technik Tag 2009, FH Vorarlberg, Dornbirn, Austria, 27 January 2009.

FZMT: System- und Prozessanalyse durch Simulation, VTT - Vorarlberger Technik Tag 2009, FH Vorarlberg, Dornbirn, Austria, 27 January 2009.

2008

H.P.Huber, F.Hernberger, S.Kery and S.Zoppel: Selective structuring thin-film solar cells by ultrafast laser ablation. Published in: Proceedings of SPIE - The International Society of Optical Engineering 6881 (2008).

L.Matay, R.Andok, V.Barak, A.Konecnikova, I.Kostic, S.Partel, P.Hudek: New progressive method suitable for the exposure optimization of large and complex defect-free chips direct written by ZBA 21 e-beam tool, The 7th Int’l Conf. on Advanced Semicond. Devices and Microsystems (ASDAM), Smolenice, Slovakia, 12 to 16 October 2008. Published in: IEEE Electron Dev. Society.

M.Rosenauer, M.Spitzbart, S.Zoppel, M.Vellekoop: Ultra Rapid High Quality Prototyping for Optical Microfuidic Analysis Devices, EUROSENSORS 2008, Dresden, Germany, 7 to 10 September 2008.
Published in: Proc. EUROSENSORS XXII, ISBN 978-3-00-025217-4, Paper Nr. 061, 4 S.

A.Rigler, Ch.Wagner, P.Svasek, A.Jachimowicz, P.Hudek, M.Kraft, M.J.Vellekoop: Improved lamination micromixer with wedge shaped inlet channels for IR spectroscopy, EUROSENSORS 2008, Dresden, Germany, 7 to 10 September 2008. Published in: Proc. EUROSENSORS, ISBN 978-3-00-025217-4, pp 577-580.

L.Matay, R.Andok, S.Partel, P.Hudek: Large structured arrays with high pattern density, APCOM 2008, Liptovský Ján, Slovakia, 25 to 27 June 2008. Published in: Proc. 4th Int’l Conf. on Applied Physics of Condensed Matter (APCOM 2008), (Session 5B, J.Vajda, M.Weis, M.Vanco, E.Psotka, Editors), ISBN 978-80-227-2902-4, p.142-145.

P.Choleva, S.Partel, R.Mathies: Mikrogalvanik in tiefen SU8 Strukturen, Dornbirner Mikrotechniktage, Dornbirn, Austria, 27 to 28 May 2008.

T.Wehlus, T.Hackl, S.Zoppel, J.Edlinger, T.Koerner, H.Karl, W.Brütting, B.Stritzker:
Ultrashort Pulsed Laser Structuring of Garnet Planar Waveguides for Organic-Inorganic Hybride Materials, E-MRS Spring meeting, Strasbourg, France, 26 to 30 May 2008.

M.Rosenauer, S.Zoppel, M.Vellekoop: A Novel Microfluidic Sensor System Fabricated by SU-8 Femtosecond Pulsed Laser Prototyping, International Spring Seminar on Electronics Technology (ISSE), Budapest, Hungary, 7 to 11 May 2008.
Published in: Abstract Proceedings - Reliability and Life-time Predition, (2008), ISBN: 978-963-06-4915-5; p. 240-241.

S.Partel, L.Matay, P.Hudek: Hochauflösende Kontaktlithographie, 2-te Forschungsforum der österreichischen Fachhochschulen FHK Wels, Austria, 26 to 27 March 2008.

 S.Zoppel: Mikrostrukturierung von Dielektrika und Halbleitern mit ultrakurzen Laserpulsen, 2-te Forschungsforum der österreichischen Fachhochschulen FHK Wels, Austria, 26 to 27 March 2008.

D.Seyringer: Mikrotechnik-Aktivitäten in Vorarlberg, PLATON Nanophotonics Day 2008, Vienna, Austria, 28 March 2008.

 L.Pain, B.Icard, S.Tedesco, B.Kampherbeek, G.Gross, C.Klein, H.Loeschner, E.Platzgummer, R.Morgan, S.Manakli, J.Kretz, C.Hohle, K.-H.Choi, F.Thrum, E.Kassel, W.Pilz, K.Keil, J.Butschke, M.Irmscher, F.Letzkus, P.Hudek, A.Paraskevopoulos, P.Ramm, J.Weber: MAGIC: a European program to push the insertion of maskless lithography, Emerging Lithographic Technologies XII, San Jose, CA, USA, 26 February 2008. Frank M. Schellenberg, Editor (2008) 69211S. 

B.Meliorisz, S.Partel, T.Schnattinger, T.Fühner, A.Erdmann, P.Hudek: Investigation of high-resolution contact printing, MNE’07 - 33rd International Conference on Micro- and Nano-Engineering Conference, Copenhagen, Denmark, 23 to 26 September 2007.

2007

S.Zoppel, S.Partel, P.Choleva, M.Lederer, G.A.Reider: Selective femtosecond Laser Microstructuring of photoresists and TCO, 26th ICALEO, Orlando, Fl, 29 October to 1 November 2007.

D.Andrijasevic, W.Smetana, S.Zoppel, W.Brenner: An investigation on development of MEMS in LTCC by embossing technique, 4M 2007 - 3rd International Conference on Multi-Material Micro Manufacture, Borovets, Bulgaria, 3 to 5 October 2007.
Published in: Proc. of 4M 2007 (Edited by Stefan Dimov, Wolfgang Menz and Yuli Toshev, Organized by: FP6 4M Network of Excellence Whittles Publishing), CRC Press ISBN 978-1904445-53-1, p.143-146 (2007).

S.Partel, S.Zoppel, G.Hairer, G.Stangl, L.Matay, P.Hudek: Development of a high resolution UV contact lithography process for the fabrication of interdigitated electrode arrays, NanoEurope 2007, Fair & Conference, St. Gallen, Switzerland, 11 to 13 September 2007.

S.Zoppel, S.Partel, P.Choleva, P.Hudek, H.Huber, M.Lederer, J. Aus der Au, G.A.Reider: Micro structuring of photoresist with femtosecond laser pulses, CLEO Europe 2007 – Conference on lasers and electro-optics, Munich, Germany, 17 to 22 June 2007.

S.Zoppel, S.Partel, J.Zehetner, P.Hudek, G.A.Reider: Selective laser ablation of photoresists for MEMs devices, LPM 2007 – 8th International Symposium on Laser Precision Microfabrication, Vienna, Austria, 23 to 27 April 2007.

R.Merz, P.Hudek, S.Partel, R.Holly, K.Hingerl, H.Seyringer: Herstellung drei-dimensionaler Siliziumkeile zur optischen Kopplung von Glasfasern und integrierten optischen Wellenleitern, FFH2007, Salzburg, Austria, 11 to 12 April 2007. Published in: Erstes Forschungsforum der Österreichischen Fachhochschulen.

 J.Nicolics, L.Musiejovsky, J.Steurer, I.Giouroudi, H.Hauser, M.Mündlein, S.Zoppel, J.Zehetner: Laser Welding Process Optimization for the Production of Giant Magnetoimpedance Magnetic Field Sensors. Published in: Sensor Letters, Vol.5, No.1, pp. 204-206 (2007).

P.Hudek, U.Denker, D.Beyer, N.Belic, H.Eisenmann: Fogging effect correction method in high-resolution electron beam lithography, MNE’06 - International Micro- and Nano-Engineering Conference, Barcelona, Spain, 17 to 20 September 2006.

S.Zoppel, H.Huber, G.A.Reider: Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells.

S.Zoppel, J.Zehetner, G.A.Reider: Two color laser ablation: Enhanced yield, improved machining. 

 R.Holly, K.Hingerl, R.Merz, P.Hudek: Fabrication of silicon 3D taper structures for optical fibre to chip interface, MNE’06 - International Micro- and Nano-Engineering Conference, Barcelona, Spain, 17 to 20 September 2006.

V.Wieger, S.Zoppel, E.Wintner: Ultrashort Pulse Laser Osteotomy.

D.Andrijasevic, W.Smetana, J.Zehetner, S.Zoppel, W.Brenner: Aspects of micro structuring Low Temperature Cofired Ceramic (LTCC) for realisation complex 3D objects by embossing, MNE’06 - Micro and Nano Engineering Conference, Barcelona, Spain, 17 to 20 September 2006.

M.Farsari, G.Filippidis, S.Zoppel, G.A.Reider, C.Fotakis: Micromachining of Silicon Carbide using femtosecond lasers, 8th Conference on laser ablation, Banff, Canada, 2005.

S.Zoppel, D.Gray, M.Farsari, R.Merz, G.A.Reider, C.Fotakis: UV-femtosecond laser ablation of SrTiO3 single crystals, 8th Conference on laser ablation, Banff, Canada, 2005.

2006

E.Lausecker, W.Schwinger, I.Bergmair, M.Mühlberger, R.Schöftner, S.Partel, P.Hudek: Fabrication of 4" PDMS stamps and large area sub-µm µCP, Workshop of the Austrian Networks for Nanosciences and Nanotechnology, Danube-University Krems, Austria, 21 to 22 November 2006. Published in: WORKSHOP of the AUSTRIAN NETWORKS for NANOSCIENCES and NANOTECHNOLOGY.

S.Zoppel, M.Lederer, J.Smolenski, H.Huber, R.Braunschweig, D.Kopf: Compact Ultrafast Lasers: Thin film structuring for photovoltaic applications, ICALEO 2006 - 25th International Congress on Applications of Lasers Electro-Optics, Scottsdale, Arizona, 30 October to 2 November 2006.

R.Holly, K.Hingerl, R.Merz, P.Hudek, S.Neve, S.Partel, T.Auer: Fabrication of silicon vertical taper structures for fiber to chip coupler by KOH anisotropic etching, GMe-Workshop 2006 (im Rahmen der Vienna-Tech 2006), Reed Messe Wien, Austria, 13 October 2006.

P.Hudek, D.Beyer, U.Denker: Writing and exposure optimization in maskless electron beam lithography (Invited presentation), 4th IISB Lithography Simulation Workshop, Hersbruck, Germany, 29 September to 1 October 2006.

V.Wieger, S.Zoppel, and E.Wintner: Ultra-short pulse laser osteotomy, 15th International Laser Physics Workshop (LPHYS’06), Lausanne, Switzerland, 24 to 28 July 2006.

S.Zoppel, H.Zehetner, L.Musiejovsky, H.Hauser and J.Nicolics: Laser Micromachining for GMI-Sensors, EMSA 2006 - 6th European Conference on Magnetic Sensors and Actuators, Bilbao, Spanien, 3 to 5 June 2006.

S.Zoppel, J.Zehetner, G.A.Reider: Two color laser ablation: enhanced yield, improved quality, E-MRS - European Materials Research Society Spring meeting 2006, Nizza, Frankreich, 29 May to 2 June 2006.

S.Zoppel, S.Partel, J.Nicolics, G.A.Reider, J.Zehetner: Laserablation und ihre Anwendung in der Mikrotechnik, Dornbirner Mikrotechniktage, Dornbirn, Austria, 30 May to 1 June 2006.

S.Partel, S.Zoppel, P.Hudek, T.Auer , J.Zehetner, W.Smetana , H.Homolka , B.Balluch: Entwicklung zusammenhängender Fertigungsschritte für optische, elektrische und fluidische Mikrosysteme, Dornbirner Mikrotechniktage, Dornbirn, Austria, 30 to 31 May 2006.

H.Huber, S.Zoppel, M.Lederer, J.Smolenski, R.Braunschweig, D.Kopf: High Repetition Rate Micromachining of Dielectrics and Ceramics with Ultrafast Lasers (Invited Lecture), PHAST 2006 – Photonic applications system technologies, Long Beach, CA, USA, 22 to 25 May 2006.

H.Huber, S.Zoppel, J.Zehetner, R.Merz, M.Lederer, W.Seitz, D.Kopf: High Repetition Rate Ultrafast Lasers and their Applications in Micromachining, LAMP 2006 - The 4th International Congress on Laser Advanced Materials, Kyoto, Japan, 16 to 19 May 2006, 

P.Hudek: High-Resolution Patterning in the Micro- and Nano-Technology using Charged Particles (Invited Lecture), Christian Doppler Laboratory of Surface Optics, Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Austria, 22 May 2006.

A.Yousif, M.Strassl, V.Wieger, S.Zoppel, E.Wintner: Oral Applications of Ultra-Short Laser Pulses - a New Approach for Gentle and Painless Treatment?

M.Drzik, H.Loeschner, W.Fallmann, P.Hudek, I.W.Rangelow, Y.Sarov, T.Lalinsky, J.Chlpik: Mechanical characterization of membrane like microelectronic components (Invited Poster), MNE 2005 - 31st Int’l Conf. on Micro- and Nano-Engineering, Vienna, Austria, 19 to 22 September 2005.

P.Hudek, D.Beyer: Exposure optimization in high-resolution electron-beam lithography, MNE 2005 - 31st Int’l Conf. on Micro- and Nano-Engineering, Vienna, Austria, 19 to 22 September 2005.

S.Zoppel, M.Farsari, R.Merz, J.Zehetner, G.Stangl, G.A.Reider, C.Fotakis: Laser micro machining of 3C-SiC single crystals, MNE 2005 - 31st Int’l Conf. on Micro- and Nano-Engineering, Vienna, Austria, 19 to 22 September 2005.

2005 

P.Hudek: Hochauflösende Mikrostrukturierung mittels E-Strahl-Lithographie und Trockenätzen (Invited Lecture), Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Germany, 8 November 2005.

U.Denker, P.Hudek: Proximity Correction for High Resolution Direct Write, 3rd Int’ Mask Workshop at IMS Chips, Stuttgart, Germany, 28 October 2005.

S.Zoppel, J.Zehetner, G.A.Reider: Improved picosecond laser ablation with second harmonic seeding, 5th International Conference on Photonics, Devices and Systems, Prague, Czech Republic, 8 to 11 June 2005.

J.Zehetner, T.Auer, H.Duelli, P.Hudek, R.Merz, S.Neve, S.Partel, H.Wadlegger, S.Zoppel G.Stangl: Laserbearbeitung am Forschungszentrum Mikrotechnik der FH Vorarlberg, Dornbirner Mikrotechniktage, Dornbirn, Austria, 22 to 23 March 2005.

P.Hudek: Elektronenstrahl Lithographie - Nanostrukturierung mit Optimierung (Invited Lecture), ARC Seibersdorf Research GmbH, Nano-Systemtechnologien, Tech Gate Vienna, 28 February 2005.

J.Zehetner, S.Zoppel, R.Merz, H.Huber: Neue Pikosekundenlaserkonzepte und ihre Anwendungen, Laser in der Elektronikproduktion & Feinwerktechnik, Tagungsband: LEF 2005, Hrsg.: M.Geiger, S.Polster, Meisenbach, Bamberg, 2005.

M.Farsari, G.Filippidis, S.Zoppel, G.A.Reider and C.Fotakis: Efficient femto second laser micromachining of bulk 3C-SiC. 

S.Zoppel, R.Merz, J.Zehetner, G.A.Reider: Enhancement of laser ablation yield by two color excitation

S.Zoppel, D.Gray, M.Farsari, R.Merz, G.A.Reider, C.Fotakis: Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femto second laser

2004

D.Beyer, P.Hudek, O.Fortagne, T.Groves, J.Gramss: Writing Nano-Imprint Templates by Shaped E-beam Lithography, 3rd International Conference on Nanoimprint und Nanoprint Technology, Vienna, Austria, December 2004.

2003

G.Stangl, G.A.Reider, S.Zoppel, W.Friza, A.Jarisch: Overview on Ablation Techniques at wavelengths of 193 and 248 nanometers, 7th International Conference on Laser Ablation, Kreta, Greece, October 2003.

 

 

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