The Research Centre for Microtechnology operates a FEI XL30-ESEM FEG scanning electron micro-scope. The equipment is able to generate magnified images of a broad range of samples - electrically conducting or insulating samples, samples containing a high fraction of water and biological samples. It is not necessary to apply a conductive coating to insulating materials to analyze them.

The results provided by the analytical capabilities of this instrument are interpreted by an experienced materials scientist. Elemental analysis and elemental mapping often provide a clue to a causal explanation for defects in components. This instrument and the scientific consulting connected with it are offered as a service to local industry.


  • SEM images of samples
  • Magnification X 30 to X 300 000
  • Fracture analysis requiring depth of focus
  • Elemental analysis, elements with fraction
  • Elemental mapping, local distribution of elements
  • Consulting

Fields of applications

  • Conductive, insulating, wet and biological samples
  • Inorganic samples: free of oil and lubricants
  • Qualitative elemental analysis from B (atomic number 5) to Pb (atomic number 82)
  • Quantitative elemental analysis from Na (atomic number 11) upwards
  • Weight fraction of element to be analysed should be > 0.5 %

Physical characteristics

  • Typical sample size: between a grain of sand and a cork
  • Maximum sample size: 100*100*50 mm
  • Traversing range of sample holder: circle of 50 mm diameter
  • Diameter of z-axis: 25 mm


Microparts, surface structures, coatings, fractures of all kinds, corrosion and its by-products, inclusions, fibres, preparation of layered materials.

Kontaktperson aus der Forschung

Heinz Duelli

Prof. (FH) Dipl.-Ing. Dr. Heinz Duelli
Scanning electron microscopy, materials and damage analysis

 +43 5572 792 1008